Ebara Technologies Incorporated

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EBARA Technologies is the exclusive North American sales and service representative for Airgard Exhaust Gas Scrubbers. EBARA is an American subsidiary of the Precision Machinery Group of EBARA CORPORATION, a manufacturer of vacuum pumps and advanced technology products for clean environments. Before 1991, EBARA Technologies operated as the vacuum division of EBARA International Corporation. EBARA Technologies operates two divisions the components division and the semiconductor equipment division. The EBARA Components Division supplies products, services and applications assistance to the semiconductor, research and development, university and industrial and chemical process industries. Its Semiconductor Equipment Division is a supplier of chemical mechanical polishing systems that are installed in semiconductor production and pilot line facilities. EBARA is a member of Semiconductor Equipment and Materials International, American Vacuum Society and American Vacuum Equipment Manufacturers. The technology subsidiary was founded in 1990.