Actinix

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Company Actinix is a research and development company specializing in solid-state laser systems that primarily operate in the far-UV ( below 200 nm ) and in optical tools for nano-scale semiconductor processing. Actinix has been developing solid-state far-UV lasers since 1999. Our first product was a 10-Hz solid-state 193-nm laser that was eventually incorporated into a commercial sampling system for mass spectroscopy applications. In 2001 we received a contract from International Sematech to build a high-resolution actinic 193 nm microscope and photomask metrology tool. That development led eventually to NSF Phase I and Phase II SBIR awards to develop a more sophisticated 193 nm laser and a microscope for measuring the OPD of advanced alternating-aperture phase-shifting photomasks. In 2007 we completed a joint development with IBM in which our 5 kHz 193 nm laser light source was used on IBM's immersion interference lithography tool ( NEMO ). One of our current R&D projects is the development a long coherence length, sub-200 nm laser which will enable full-field interference immersion lithography for the manufacture of advanced integrated circuits; this effort is supported through a DARPA STTR contract.Actinix has also been working with technology partners on the commercialization of promising new microscopy techniques for deep tissue cellular imaging and non-invasive cellular analysis. To address this important market we recently spun out CytoRay, a new start-up company. As a strategic partner CytoRay will employ Actinix laser technology in its new optical systems for cellular imaging and analysis.Customer ServiceWe are happy to discuss your technology needs. Please email us at [email protected], or call ( 831 ) 440-9388.